Genius
Online Quadrupole Mass Spectrometer
Genius is an online quadrupole mass spectrometer, which means it is designed to watch a process while the process is running rather than to analyse samples afterwards. A dual detector arrangement covers a wide dynamic range, the readout is fast enough to follow process transients, and industrial protocols let it report straight into the tool’s control system. An integrated turbomolecular pump keeps the installation self-contained.
Specifications
- Analyser
- Quadrupole mass spectrometer (QMS) with electron impact ionization
- Mass range
- 1–100, 1–200 or 1–300 amu
- Readout speed
- Up to 1000 readings per second per amu
- Detectors
- Faraday and secondary electron multiplier (SEM) for wide dynamic range
- Sampling pressure
- 1×10⁻⁵ torr to 30 psi
- Communication
- EtherCAT, Modbus and serial (RS232)
- Vacuum system
- Integrated turbomolecular pump
- Control
- Built-in process logic controller with analysis software
Hakuto and its product names are trademarks of the manufacturer. Specifications on this page are reproduced from the manufacturer’s own published material and may change without notice; please confirm current details with us before ordering.